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A New Generation of Laser Direct Imaging


TFT/OLED Flat Panel Display Technology Solutions

ALDI-FD Series – for large scale photomask and OLED/TFT manufacturing!

ALDI - FD provides solution for making high quality large scale photomask for the production of OLED/TFT flat panel display or it also can be used as the laser direct imaging solution for the manufacturing of OLED/TFT flat panel display.
This system has excellent CD uniformity and capable to pattern very narrow sub-10 micron line and space. It uses a unique exposure procedure, utilizing highly efficient semiconductor light source and a high resolution spatial light modulator to generate clean high definition image with refined line width and narrow space without stitching error. This system optimized for different kinds of photomasks allowing the user to process different size photomask for their requirements. ALDI-FD system, containing many optical engines, enables substrate exposure of up to 1000 mm x 1000 mm² in just a few minutes with resolution down to 3um.
ALDI-FD offers a better solution for production of OLED/TFT flat panel display by providing a better ROI.
Features
  • Minimum feature size is 3um line and space, smaller feature size available upon request.
  • Standard substrate size up to 1000 x 1000 mm², larger substrate size available upon request.
  • High power laser system capable to image on any photoresist.
  • Excellent CD uniformity
  • Multi-engines scanning technology enable high throughput rate even for large area imaging purpose.
  • Real time scaling and distortion compensation technology allowing dynamic adaption to scale and rotate the pattern in real time to compensate any variation cause by flatness variation or board deformation for better registration performance.
Customization and Automation Option
Aiscent can work exclusively and meticulously with you in order to design an ALDI-FD that perfectly matches your needs. Depending on the required resolution, throughput rate, substrate size, and accessory needs, Aiscent can customize a machine to fit your requirements. Please contact sales for additional information and consultation.

ALDI-FD Exposure Results

Exposure results for ALDI-FD Series
 

 

 

 

 

Exposure results for ALDI-FD Series

Datasheet

ALDI-FD for OLED/TFT Manufacturing Solution (.pdf 88KB)