Semiconductor Lithography Solutions
ALDI-SL Series – a revolution of conventional lithography!
Minimum feature size is 1um line and space.
Standard substrate size up to 200 x 200 mm², larger substrate size available upon request.
Line edge smoothing technology utilizing micro lens array to produce better line edge performance and resolution.
High power laser system capable to image on any photoresist.
Excellent CD uniformity
Real time scaling and distortion compensation technology allowing dynamic adaption to scale and rotate the pattern in real time to compensate any variation cause by flatness variation for better registration performance.
Customization and Automation Option
Aiscent can work exclusively and meticulously with you in order to design an ALDI-SL that perfectly matches your needs. Depending on the required resolution, throughput rate, substrate size, and accessory needs, Aiscent can customize a machine to fit your requirements. Please contact our sales for additional information and consultation.
ALDI-SL Exposure results
ALDI-SL for Semiconductor Lithography Solution (.pdf 97KB)